Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima; Yasuji Muramatsu; Hisataka Takenaka

doi:10.1117/12.561199

14 October 2004 Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka

Proceedings Volume 5538, Optical Constants of Materials for UV to X-Ray Wavelengths; (2004) https://doi.org/10.1117/12.561199
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B₄C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B₄C 36.57Å] and [Ru 24.06Å/B₄C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

Citation Download Citation

Takeo Ejima, Yasuji Muramatsu, and Hisataka Takenaka "Angle-dependent total electron yield spectra in multilayer films for standing wave measurements", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.561199

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