Comparison of a new contact topographical measurement system for spherical and aspherical surfaces with interferometry

Elmar G. Pitschke; Markus Schinhaerl; Peter Sperber; Rolf Rascher; Richard Stamp; Lyndon N. Smith; Melvyn Smith; Andreas Hammer

doi:10.1117/12.558899

14 October 2004 Comparison of a new contact topographical measurement system for spherical and aspherical surfaces with interferometry

Elmar G. Pitschke, Markus Schinhaerl, Peter Sperber, Rolf Rascher, Richard Stamp, Lyndon N. Smith, Melvyn Smith, Andreas Hammer

Author Affiliations +

Proceedings Volume 5523, Current Developments in Lens Design and Optical Engineering V; (2004) https://doi.org/10.1117/12.558899
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Since end of 2003 the TII-3D - the new contact topography measuring device for measuring aspherical and spherical surfaces - is available on market. Due to its novel technology, the system is specified to measure a large range with λ/10 accuracy, therefore being a very flexible tool for pre- and post-measurements in high quality zonal polishing processes like MRF. At the University of Applied Sciences Deggendorf a testing series has been carries out to compare the results of the TII-3D with CGH-interferometric measurements on aspherical surfaces. An analysis of the measurement errors is shown and ranking of the different metrology systems for production processes of high quality aspherical lenses is given.

Citation Download Citation

Elmar G. Pitschke, Markus Schinhaerl, Peter Sperber, Rolf Rascher, Richard Stamp, Lyndon N. Smith, Melvyn Smith, and Andreas Hammer "Comparison of a new contact topographical measurement system for spherical and aspherical surfaces with interferometry", Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); https://doi.org/10.1117/12.558899

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