Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)

Ferdinando Cannella; Barbara Marchetti

doi:10.1117/12.579567

22 June 2004 Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)

Ferdinando Cannella, Barbara Marchetti

Author Affiliations +

Proceedings Volume 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2004) https://doi.org/10.1117/12.579567
Event: Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2004, Ancona, Italy

Abstract

The aim of this research is to evaluate the effect of the interaction between the Laser Doppler Vibrometer and the sample in the microscale. In particular the attention will be focused in the numerical and experimental evaluation of the heating effect due to the laser beam power. The consequent temperature variation will be related to the measurement results in terms of resonance frequencies and vibrational modes determination.

Citation Download Citation

Ferdinando Cannella and Barbara Marchetti "Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems (MEMS)", Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); https://doi.org/10.1117/12.579567

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available