Nanodisplacement control with optical heterodyne interferometry

Luc Chassagne; Suat Topcu; Darine Haddad; Yasser Alayli; Patrick Juncar

doi:10.1117/12.544651

10 September 2004 Nanodisplacement control with optical heterodyne interferometry

Luc Chassagne, Suat Topcu, Darine Haddad, Yasser Alayli, Patrick Juncar

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.544651
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

This paper presents a positioning control system based on an optical heterodyne interferometric technique associated to a home-made high frequency electronic board. This system aims to control the translation of a mechanical stage with a quantified step as low as 0.258 574 970 5 (5) nm. Intrinsic relative uncertainty is very low. Hence the method is suitable for long displacement range, even millimeters long. Experimental results show the reliability of the method.

Citation Download Citation

Luc Chassagne, Suat Topcu, Darine Haddad, Yasser Alayli, and Patrick Juncar "Nanodisplacement control with optical heterodyne interferometry", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.544651

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