The effects of varying substrate angle on feature quality in femtosecond laser ablation of ferrous alloys

Jeremy A Palmer; Karen L. McDaniel; Marc F Harris; Ronald Lumia; Michelle L Griffith

doi:10.1117/12.546084

20 September 2004 The effects of varying substrate angle on feature quality in femtosecond laser ablation of ferrous alloys

Jeremy A Palmer, Karen L. McDaniel, Marc F Harris, Ronald Lumia, Michelle L Griffith

Author Affiliations +

Proceedings Volume 5448, High-Power Laser Ablation V; (2004) https://doi.org/10.1117/12.546084
Event: High-Power Laser Ablation, 2004, Taos, New Mexico, United States

Abstract

This paper presents the results of an experimental study to establish process parameters for repeatable, high quality ablated features in ferrous substrates using a Ti:sapphire femtosecond laser system. Initial trials with stainless steel substrates were conducted in ambient atmospheric conditions. Laser power and exposure parameters were varied, in addition to the angle of the substrate relative to the beam. Ablated holes were sectioned, and examined. Data was reduced according to the Taguchi/ANOVA method. The optimal process parameter set minimized the figures of merit for quality or accuracy of the ablated hole. In trials using pulsed ablations, high accuracy holes were associated with laser power greater than 600 mW, substrate angles of 30-45 degrees, and 1000 pulses. In the dwell experiments, high accuracy holes were achieved with a similar power level, and a 1-second dwell time. In contrast to the pulse results, a shallow substrate angle (30 degrees or less) yielded favorable results. In subsequent trials, kovar substrates were processed in a vacuum at constant fluence with a 1-second dwell time. A localized flow of nitrogen removed ablation products. Results were compared to those of the initial trial, leading to significant observations regarding the use of vacuum and secondary process gas.

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Jeremy A Palmer, Karen L. McDaniel, Marc F Harris, Ronald Lumia, and Michelle L Griffith "The effects of varying substrate angle on feature quality in femtosecond laser ablation of ferrous alloys", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.546084

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