Structural diagnostics of quantum layers by x-ray diffraction and standing waves

M. A. Chuev; A. M. Afanas'ev; Rafik M. Imamov; E. Kh. Mukhamedzhanov; E. M. Pashaev; S. N. Yakunin

doi:10.1117/12.562668

28 May 2004 Structural diagnostics of quantum layers by x-ray diffraction and standing waves

M. A. Chuev, A. M. Afanas'ev, Rafik M. Imamov, E. Kh. Mukhamedzhanov, E. M. Pashaev, S. N. Yakunin

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.562668
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

We analyze the possibility for simultaneous adequate treatment of angular dependencies of the X-ray diffraction reflectivity and photoelectron yield (X-ray standing waves method) in order to extract the structural characteristics of semiconducting materials with ultra fine inclusions. Facilities of such an approach for evaluation of the degree of structural perfection of the layers, the phase shift of upper layers with respect to the buffer, the lattice parameters of particular layers and interfaces between them are demonstrated within the analysis of heterostructures based on the Si matrix with the Si_1-_xGe_x quantum wells and on the GaAs matrix with the InAs quantum dots.

Citation Download Citation

M. A. Chuev, A. M. Afanas'ev, Rafik M. Imamov, E. Kh. Mukhamedzhanov, E. M. Pashaev, and S. N. Yakunin "Structural diagnostics of quantum layers by x-ray diffraction and standing waves", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.562668

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available