Molecular dynamics study of nonlinear sputtering

Evgeni E. Zhurkin; Anton S. Kolesnikov

doi:10.1117/12.555386

5 April 2004 Molecular dynamics study of nonlinear sputtering

Evgeni E. Zhurkin, Anton S. Kolesnikov

Proceedings Volume 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2004) https://doi.org/10.1117/12.555386
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Sputtering of Ni and Cu fcc metals under impact of small N-atomic clusters (N=1÷55) with energies of 500 eV/atom is studied by means of classical molecular dynamics (MD) method. The mechanisms responsible on observed non-linear effects in sputtering (like non-additive enhancement of sputtering yield, late emission, etc.) are analyzed at atomic scale. The role of electronic subsystem of the metals is also discussed in respect to observed spike effects that take place both at collisional and post-collisional cascade stages. It is demonstrated that electron-phonon coupling may significantly influence on post-cascade heat spike development reducing non-additive enhancement of sputtering yields of metals in course of cluster bombardment.

Citation Download Citation

Evgeni E. Zhurkin and Anton S. Kolesnikov "Molecular dynamics study of nonlinear sputtering", Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); https://doi.org/10.1117/12.555386

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available