Pulsed VUV sources and their application to surface cleaning of optical materials

Deb M. Kane; D. Hirschausen; B. K. Ward; Robert J. Carman; Richard P. Mildren

doi:10.1117/12.552735

2 April 2004 Pulsed VUV sources and their application to surface cleaning of optical materials

Deb M. Kane, D. Hirschausen, B. K. Ward, Robert J. Carman, Richard P. Mildren

Proceedings Volume 5399, Laser-Assisted Micro- and Nanotechnologies 2003; (2004) https://doi.org/10.1117/12.552735
Event: Laser-Assisted Micro- and Nanotechnologies 2003, 2003, St. Petersburg, Russian Federation

Abstract

Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation -- a preferred type of output for materials processing and many other applications. Results of such a Xe₂* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.

Citation Download Citation

Deb M. Kane, D. Hirschausen, B. K. Ward, Robert J. Carman, and Richard P. Mildren "Pulsed VUV sources and their application to surface cleaning of optical materials", Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); https://doi.org/10.1117/12.552735

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