Silicon-based near-infrared tunable filters based on liquid crystals

Alberto Mezzetti; Georg Pucker; Michele Crivellari; Constantinos Kompocholis; Pierluigi Bellutti; Alberto Lui; Nicola Daldosso; Francesco Riboli; Massimo Saiani; Zeno Gaburro; Lorenzo Pavesi

doi:10.1117/12.527762

1 July 2004 Silicon-based near-infrared tunable filters based on liquid crystals

Alberto Mezzetti, Georg Pucker, Michele Crivellari, Constantinos Kompocholis, Pierluigi Bellutti, Alberto Lui, Nicola Daldosso, Francesco Riboli, Massimo Saiani, Zeno Gaburro, Lorenzo Pavesi

Author Affiliations +

Proceedings Volume 5357, Optoelectronic Integration on Silicon; (2004) https://doi.org/10.1117/12.527762
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

Complementary metal-oxide-semiconductor-compatible tunable Fabry-Perot microcavities filled with liquid crystals (LCs) were realized and studied in the near-infrared region. The microcavities were produced by chip bonding technique, which allows one to infill LC between two [SiO₂/Si]n λ/4 (λ = 1.5 μm) Dielectric Bragg Reflectors separated by 950 nm thick SiO₂ posts. The Dielectric Bragg reflectors were realized on Si or SiO₂ substrates Liquid crystals with positive and negative dielectric anisotropy were used, i.e. MerckE7 (Δε=13.8) and Merck-6608 LC (Δε=-4.2). Mirror-integrated electrodes allow an external bias to induce an electrical field and to tune the LC properties and, hence, the microcavity resonance. Electric-field-induced shifts of the second-order cavity modes of ~120 nm and ~50 nm were obtained for Merck-E7 and Merck-6608 LC, with driving potentials of 5 V and 10 V, respectively. The transmittance at the cavity resonance is typically in the order of 10%. Simulation of cavities allows to identify surface roughness of the Dielectric-Bragg-Reflectors as the major origin of the transmission losses. The switching behavior of microcavities filled with E7 were studied as function of applied fields. Both switch-on t_on and switch-off t_off times were measured and were found to be lower than 5 ms.

Citation Download Citation

Alberto Mezzetti, Georg Pucker, Michele Crivellari, Constantinos Kompocholis, Pierluigi Bellutti, Alberto Lui, Nicola Daldosso, Francesco Riboli, Massimo Saiani, Zeno Gaburro, and Lorenzo Pavesi "Silicon-based near-infrared tunable filters based on liquid crystals", Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); https://doi.org/10.1117/12.527762

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available