Further improvements of high-precision gas analysis in DUV region

Hanns S. Eckhardt; Klaus Behler; Matthias Frank; Kenneth T. V. Grattan; Karl-Friedrich Klein; R. Koetschau; Uwe Schroeder

doi:10.1117/12.540736

10 June 2004 Further improvements of high-precision gas analysis in DUV region

Hanns S. Eckhardt, Klaus Behler, Matthias Frank, Kenneth T. V. Grattan, Karl-Friedrich Klein, R. Koetschau, Uwe Schroeder

Author Affiliations +

Proceedings Volume 5317, Optical Fibers and Sensors for Medical Applications IV; (2004) https://doi.org/10.1117/12.540736
Event: Biomedical Optics 2004, 2004, San Jose, CA, United States

Abstract

In the deep ultra-violet (DUV) and the mid infra red (MIR) regions of the spectrum, the so-called Hollow Core Waveguide (HCW) is an alternative for light-delivery systems. In addition to efficient light transportation, the HCW can be used as an intrinsic sensor: due to the long path-length through the HCW the spectral absorption of the gas under test can easily be monitored. Based on preliminary studies, the UV-region from 170 nm up to 250 nm seemed to be a very attractive alternative for gas-analyses, in comparison to the IR-region with the well-known gas-absorption bands. Using improved and adjusted components, the existing system for UV-spectroscopy was optimized. The new system will be described in details. Especially, the time-response using an external gas-feeding system is an additional parameter of the studies. Within the spectral range of the new CCD-array spectrometer from 175 to 210 nm, highly structured spectra have been determined, with a spectral resolution of less than 50 pm. In nitrogen, selected gases with extremely low concentrations in the order of 1 ppm have been measured; the absorption spectra are compared to those from IR measurements, using the HCW approach, too.

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Hanns S. Eckhardt, Klaus Behler, Matthias Frank, Kenneth T. V. Grattan, Karl-Friedrich Klein, R. Koetschau, and Uwe Schroeder "Further improvements of high-precision gas analysis in DUV region", Proc. SPIE 5317, Optical Fibers and Sensors for Medical Applications IV, (10 June 2004); https://doi.org/10.1117/12.540736

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