Bubble's function in the process of readout for PdOx- and PtOx-type super-RENS disk

Qian Liu; Junji Tominaga; Toshio Fukaya

doi:10.1117/12.522020

29 March 2004 Bubble's function in the process of readout for PdOx- and PtOx-type super-RENS disk

Qian Liu, Junji Tominaga, Toshio Fukaya

Proceedings Volume 5275, BioMEMS and Nanotechnology; (2004) https://doi.org/10.1117/12.522020
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

The bubble’s functions in readout process for PdO_x and PtO_x superresolution near-field structure (super-RENS) disk are studied with the PdO_x and PtO_x mask sample and with a repetitive Z-scan method. The results indicate that the optical responses on transmittance and reflectance are related to shape and size of the bubble. The deformation of bubbles before and after repetitive scan is observed by an optical microscope, and the sizes of the bubbles corresponding to different repetitive Z-scan order of times are analysed by an atomic force microscope.

Citation Download Citation

Qian Liu, Junji Tominaga, and Toshio Fukaya "Bubble's function in the process of readout for PdOx- and PtOx-type super-RENS disk", Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); https://doi.org/10.1117/12.522020

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