Investigation of an enhanced mask data preparation system using unified mask data formats

Toshio Suzuki; Koki Kuriyama; Junji Hirumi; Nobuyuki Yoshioka; Hidemichi Kawase; Tomoko Kamimoto

doi:10.1117/12.518436

17 December 2003 Investigation of an enhanced mask data preparation system using unified mask data formats

Toshio Suzuki, Koki Kuriyama, Junji Hirumi, Nobuyuki Yoshioka, Hidemichi Kawase, Tomoko Kamimoto

Proceedings Volume 5256, 23rd Annual BACUS Symposium on Photomask Technology; (2003) https://doi.org/10.1117/12.518436
Event: Photomask Technology, 2003, Monterey, California, United States

Abstract

Mask data preparation is a complicated process because many kinds of EB data files and jobdeck data files are used in mask manufacturers and EB data files continue to become bigger. Therefore we have started to develop new mask data format with efficient data compaction and unification among Variable-Shaped-Beam (VSB) EB mask writers. We have proposed the unified mask pattern data format for EB writers named "NEO"¹ in the 22nd annual BACUS symposium. We have proposed the unified mask layout format named "MALY" 2 and the high-compression data processing system3 for NEO in Photomask Japan 2003, too. Then we have decided to develop an enhanced mask data preparation system using NEO⁴ and MALY⁵. This system has common MDP functions not to be related to each EB writer. That would be effective in reducing mask data handling cost. In this paper we introduce the abstract of NEO and MALY and new mask data preparation system using NEO and MALY.

Citation Download Citation

Toshio Suzuki, Koki Kuriyama, Junji Hirumi, Nobuyuki Yoshioka, Hidemichi Kawase, and Tomoko Kamimoto "Investigation of an enhanced mask data preparation system using unified mask data formats", Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); https://doi.org/10.1117/12.518436

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