Wafer-scale measurement of the modes of a dielectric multilayer

Marwan Abdou Ahmed; Florent Pigeon; Olivier M. Parriaux; Svetlen H. Tonchev; Nikolay M. Lyndin

doi:10.1117/12.513690

25 February 2004 Wafer-scale measurement of the modes of a dielectric multilayer

Marwan Abdou Ahmed, Florent Pigeon, Olivier M. Parriaux, Svetlen H. Tonchev, Nikolay M. Lyndin

Proceedings Volume 5250, Advances in Optical Thin Films; (2004) https://doi.org/10.1117/12.513690
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

Prism and grating coupling techniques can be used to retrieve the refractive index and thickness of a thin film or a stack of layers from the measurement of the effective index of the guided modes they propagate. These techniques are discussed as possible means to assess the wafer scale index and thickness uniformity in the prespective of the batch manufacturing of resonant gratings. The application example considered is a grating polarizer used as a microlaser polarizing mirror.

Citation Download Citation

Marwan Abdou Ahmed, Florent Pigeon, Olivier M. Parriaux, Svetlen H. Tonchev, and Nikolay M. Lyndin "Wafer-scale measurement of the modes of a dielectric multilayer", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.513690

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