Lightweight mirrors from single-crystal silicon

Vincent T. Bly; David A. Content; John G. Hagopian; Linette D. Kolos; David O. Moore

doi:10.1117/12.511569

12 December 2003 Lightweight mirrors from single-crystal silicon

Vincent T. Bly, David A. Content, John G. Hagopian, Linette D. Kolos, David O. Moore

Proceedings Volume 5179, Optical Materials and Structures Technologies; (2003) https://doi.org/10.1117/12.511569
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A process for fabricating high quality light weight mirrors from single crystal silicon is described. The process uses conventional fabrication techniques in an unconventional sequence. It is capable of producing mirrors with 1/4th the mass of an equivalent solid quartz mirror. Each mirror is a monolithic structure of single crystal silicon. Mirrors with optical figures better than 1/10th wave peak-to-valley (@633 nm) have been demonstrated.

Citation Download Citation

Vincent T. Bly, David A. Content, John G. Hagopian, Linette D. Kolos, and David O. Moore "Lightweight mirrors from single-crystal silicon", Proc. SPIE 5179, Optical Materials and Structures Technologies, (12 December 2003); https://doi.org/10.1117/12.511569

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