Extended-wavelength InGaAs on GaAs hybrid image sensors

Joachim John; Lars Zimmermann; Patrick Merken; Stefan de Groote; Gustaaf Borghs; Chris Van Hoof; Stefan Nemeth; Thierry Colin

doi:10.1117/12.504519

10 November 2003 Extended-wavelength InGaAs on GaAs hybrid image sensors

Joachim John, Lars Zimmermann, Patrick Merken, Stefan de Groote, Gustaaf Borghs, Chris Van Hoof, Stefan Nemeth, Thierry Colin

Author Affiliations +

Proceedings Volume 5152, Infrared Spaceborne Remote Sensing XI; (2003) https://doi.org/10.1117/12.504519
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Short wavelength infrared (SWIR) photovoltaic diode structures made of InGaAs material were grown on GaAs by means of molecular beam epitaxy. Growth quality and composition of the layers are determined by HRXRD. The electrical characterization is performed by Current-Bias characterization (proposal) and spectral resolved measurements to determine the resistance area product (R0A) and the spectral responsivity (R) of diodes. The processing is performed with standard photolithography and micro-structuring techniques aiming at the production of 1D and 2D infrared camera arrays. The diced IR sensor is flip chip assembled on a Silicon read out integrated circuit (ROIC). Linear arrays of 256 pixels with 25 μm pitch were fabricated as well as focal plane arrays (FPA) of 256 × 320 pixel with 30 μm pitch. Measures of electrical interconnection yield will be shown. Functionality is proven for different applications up to 2.5 μm wavelength.

Citation Download Citation

Joachim John, Lars Zimmermann, Patrick Merken, Stefan de Groote, Gustaaf Borghs, Chris Van Hoof, Stefan Nemeth, and Thierry Colin "Extended-wavelength InGaAs on GaAs hybrid image sensors", Proc. SPIE 5152, Infrared Spaceborne Remote Sensing XI, (10 November 2003); https://doi.org/10.1117/12.504519

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available