Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology

Ludmila I. Aparshina; Anatoliy V. Chernykh; Lev Fomin; Ilia V. Malikov; Valery Yu. Vinnichenko; Gennady M. Mikhailov

doi:10.1117/12.517878

23 July 2003 Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology

Ludmila I. Aparshina, Anatoliy V. Chernykh, Lev Fomin, Ilia V. Malikov, Valery Yu. Vinnichenko, Gennady M. Mikhailov

Proceedings Volume 5128, First International Symposium on Quantum Informatics; (2003) https://doi.org/10.1117/12.517878
Event: First International Symposium on Quantum Informatics, 2002, Lipki, Russian Federation

Abstract

A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotechnology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.

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Ludmila I. Aparshina, Anatoliy V. Chernykh, Lev Fomin, Ilia V. Malikov, Valery Yu. Vinnichenko, and Gennady M. Mikhailov "Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology", Proc. SPIE 5128, First International Symposium on Quantum Informatics, (23 July 2003); https://doi.org/10.1117/12.517878

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