The characteristics of high reflection thin films in a COIL system

YingJian Wang; YongHao Jin; ZhengXiu Fan; JianDa Shao

doi:10.1117/12.515581

10 November 2003 Characteristics of high-reflection thin films in a COIL system

YingJian Wang, YongHao Jin, ZhengXiu Fan, JianDa Shao

Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515581
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland

Abstract

Several kinds of high reflection thin films are prepared by electron beam gun with different designs and coating materials. The reflectivity, transmission, absorption and scattering of these thin films are measured and calculated, the loss of absorption and scattering of the thin films are mainly discussed. Furthermore, the absorption of films are also analyzed under different annealing temperature, it is found that the absorption loss can be dramatically reduced after annealing. At the same time, the compositions of thin films are tested by AES (Auger electron spectroscopy) to detect whether there is impurity or contamination.

Citation Download Citation

YingJian Wang, YongHao Jin, ZhengXiu Fan, and JianDa Shao "Characteristics of high-reflection thin films in a COIL system", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515581

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