Vibration measurement of microcomponents by fringe projection method

Tao Wu; ChoJui Tay; Chenggen Quan; Shihua Wang; HuaiMin Shang

doi:10.1117/12.514242

24 April 2003 Vibration measurement of microcomponents by fringe projection method

Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, HuaiMin Shang

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.514242
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

This paper presents an optical fringe projection method for measuring the dynamic micro-components. Using a programmable liquid crystal display (LCD) projector and a long working distance microscope (LDM), sinusoidal fringes are projected onto a micro-component. The image of the fringe pattern is captured by another LDM and a high-speed camera and subsequently processed by the Fast Fourier Transform (FFT) technique. A simple procedure is described which enables calibration of the optical setup for subsequent amplitude and frequency measurement of the vibrating components. To overcome the underexposure problem, a white light source (WLS) is incorporated and the dynamic range of the camera is increased by a factor of 6. Discrepancy in the measured vibration amplitude is less than 1%.

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Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, and HuaiMin Shang "Vibration measurement of microcomponents by fringe projection method", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.514242

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KEYWORDS

Fringe analysis

High speed cameras

Projection systems

Cameras

LCDs

Vibrometry

CCD cameras

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