PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
A multi-layered surface acoustic wave (SAW) transducer employing an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer, for low concentration nitrogen dioxide (NO2) gas sensing is presented. The layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system. A frequency shift of 30 kHz is shown for a concentration of 500ppb of NO2 in synthetic air, highlighting the possibility of such a sensor being targeted towards the sub-ppb levels of NO2.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Samuel James Ippolito, Kourosh Kalantar-zadeh, Adrian Trinchi, David A. Powell, Wojtek Wlodarski, "Layered SAW nitrogen dioxide sensor with WO3 selective layer," Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.512086