Infrared wavelength-selective micromachined microbolometers

Jun Wan Kim; Dean Neikirk

doi:10.1117/12.499017

24 April 2003 Infrared wavelength-selective micromachined microbolometers

Jun Wan Kim, Dean Neikirk

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499017
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Numerical simulation of the affect of a micromachined tunable Fabry-Perot cavity on the performance of microbolometer is conducted. In particular, the ability of such a tuning structure to allow the determination of effective temperature of an object is studied. Assuming incoming infrared radiation from a blackbody source has a certain distribution of wavelengths for a specific temperature, and scanning over different Fabry-Perot gaps while using a total power detector such as a microbolometer, it is possible to predict the original blackbody spectrum. Comparing the original blackbody spectrum with the predicted spectrum, the optimum interval over which the gaps must be scanned can be determined.

Citation Download Citation

Jun Wan Kim and Dean Neikirk "Infrared wavelength-selective micromachined microbolometers", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499017

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