SiOx<Fe> thin films as material for uncooled microbolometer

K. Michailovskaya; Ivan Z. Indutnyy; Peter E. Shepeliavy

doi:10.1117/12.502296

14 April 2003 SiO_x (Fe) thin films as material for uncooled microbolometer

K. Michailovskaya, Ivan Z. Indutnyy, Peter E. Shepeliavy

Author Affiliations +

Proceedings Volume 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2003) https://doi.org/10.1117/12.502296
Event: Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2002, Kiev, Ukraine

Abstract

Composite metal-dielectric SiO_x -Fe- films with concentration of metal varied on thickness in dielectric matrix SiO_x are investigated. The reflectance and transmittance of the samples at normal incidence were measured in the 2 - 12 microns wavelength range. In the wavelength range of 2 - 8,5 microns absorption of the films is about 90%, in more long-wavelength area 8,5 - 12 microns absorption is equal 70 - 80%. The optical properties of these gradient layers are simulated, and the results of simulation are compared with experimental data. In a range of temperatures 283 - 390 K thermosensitive properties of SiO_x -Fe- films are investigated and values of temperature coefficient of resistance is determined. These coatings can be used as a sensitive layer of uncooled microbolometers.

Citation Download Citation

K. Michailovskaya, Ivan Z. Indutnyy, and Peter E. Shepeliavy "SiO_x (Fe) thin films as material for uncooled microbolometer", Proc. SPIE 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (14 April 2003); https://doi.org/10.1117/12.502296

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE