Design and analysis of a piezoelectric cantilever beam resonator

Muturi G. Muriuki; William W. Clark; Qing-Ming Chen; Qing-Ming Wang

doi:10.1117/12.483586

22 July 2003 Design and analysis of a piezoelectric cantilever beam resonator

Muturi G. Muriuki, William W. Clark, Qing-Ming Chen, Qing-Ming Wang

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.483586
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

This paper presents the design and analysis of a cantilever beam resonator that is driven by a piezoelectric material. In this paper, we shall look at the effects of miniaturizing the resonator. The beam is a bimorph structure with a Lead Zirconate Titanate (PZT) layer and a stainless steel substrate layer. The PZT layer is electroded in segments to form a sensor and actuator pair for feedback to drive the resonator. Key issues are the effects of design choices on the gain required to cause self-oscillation. These choices are placement and sizing of the sensor and actuator. The study is based on an analytical model of the beam. Results show that the gain required for self-oscillation is highly dependent on the actuator and sensor size and location, the mode of vibration and the overall resonator size.

Citation Download Citation

Muturi G. Muriuki, William W. Clark, Qing-Ming Chen, and Qing-Ming Wang "Design and analysis of a piezoelectric cantilever beam resonator", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.483586

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