Library-based process test vehicle design framework

Kelvin Yih-Yuh Doong; L.-J. Hung; Susan Ho; S. C. Lin; K. L. Young

doi:10.1117/12.485264

10 July 2003 Library-based process test vehicle design framework

Kelvin Yih-Yuh Doong, L.-J. Hung, Susan Ho, S. C. Lin, K. L. Young

Proceedings Volume 5042, Design and Process Integration for Microelectronic Manufacturing; (2003) https://doi.org/10.1117/12.485264
Event: Advanced Microelectronic Manufacturing, 2003, Santa Clara, CA, United States

Abstract

This work describes a test vehicle design framework, which minimizes the discrepancy among design rule set, tests structure design and testing plan. The framework is composed of the symbolic design rule set, Parametereized-Device, test structure generator, and test vehicle generator. An approach for simplification and consolidation of test structure is proposed to derive the concise test structure library. Finally, implementation of test vehicle is presented.

Citation Download Citation

Kelvin Yih-Yuh Doong, L.-J. Hung, Susan Ho, S. C. Lin, and K. L. Young "Library-based process test vehicle design framework", Proc. SPIE 5042, Design and Process Integration for Microelectronic Manufacturing, (10 July 2003); https://doi.org/10.1117/12.485264

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