Copy result exactly using EB-Scope technology

Keizo Yamada; Takeo Ushiki; Yousuke Itagaki; Robert Newcomb

doi:10.1117/12.485238

15 July 2003 Copy result exactly using EB-Scope technology

Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb

Proceedings Volume 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing; (2003) https://doi.org/10.1117/12.485238
Event: Advanced Microelectronic Manufacturing, 2003, Santa Clara, CA, United States

Abstract

This paper presents the concept of "copy result exactly" frameworks using EB-SCOPE technology which must be a powerful tool for coping the best process condition producing ever lasting good contact and via hole.

Citation Download Citation

Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, and Robert Newcomb "Copy result exactly using EB-Scope technology", Proc. SPIE 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing, (15 July 2003); https://doi.org/10.1117/12.485238

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available