Advanced ASIC defect control

Chuck May; John Knoch; Roger Y. B. Young

doi:10.1117/12.497615

15 July 2003 Advanced ASIC defect control

Chuck May, John Knoch, Roger Y. B. Young

Proceedings Volume 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing; (2003) https://doi.org/10.1117/12.497615
Event: Advanced Microelectronic Manufacturing, 2003, Santa Clara, CA, United States

Abstract

No abstract available.

Citation Download Citation

Chuck May, John Knoch, and Roger Y. B. Young "Advanced ASIC defect control", Proc. SPIE 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing, (15 July 2003); https://doi.org/10.1117/12.497615

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available