Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology

Wei Ma; Yitshak Zohar; Man Wong

doi:10.1117/12.478285

16 January 2003 Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology

Wei Ma, Yitshak Zohar, Man Wong

Author Affiliations +

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.478285
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Inertia micro-switches have been designed and realized using a low-temperature metal-electroplating technology compatible with processed substrates containing micro-electronic circuits. A simple but accurate lumped spring-mass model is developed based on analytical and numerical analyses. Predictions of the behavior of switches with different geometric designs have been verified using both drop hammer and shaker tests. With the application of an anti-stiction hydrophobic coating, improved storage time and un-encapsulated switches making over 50 million contacts have been demonstrated in room ambient.

Citation Download Citation

Wei Ma, Yitshak Zohar, and Man Wong "Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.478285

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