LCVD-grown microcarbon rod for MEMS applications: a study on the Raman spectroscopic characterization

Jayaraman Senthil Selvan; Sungho Jeong

doi:10.1117/12.476091

13 November 2002 LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization

Jayaraman Senthil Selvan, Sungho Jeong

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.476091
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

We have fabricated micro carbon rod/needle structures of size 30 to 400 μm on graphite substrate by the pyrolytic decomposition of ethylene precursor gas using argon ion laser (514.5 nm) at different laser power and chamber pressure. The micro carbon rods were characterized using Raman spectroscopy and two broad peaks centered at 1320-1345 cm^-1and 1589-1602 cm^-1were observed, which corresponds to D (disorder) and G (graphitic) bands, respectively. LCVD grown micro carbon rods consists of highly polycrystalline graphite as well as amorphous carbon phase. The microstructural features of the LCVD grown micro carbon rods are discussed in detail.

Citation Download Citation

Jayaraman Senthil Selvan and Sungho Jeong "LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.476091

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