Innovative machining method on CVD diamond film

Hung-Yin Tsai; Chih-Yung Cheng; Pin-Yin Liu; Tung-Chuan Wu

doi:10.1117/12.469742

13 November 2002 Innovative machining method on CVD diamond thin film

Hung-Yin Tsai, Chih-Yung Cheng, Pin-Yin Liu, Tung-Chuan Wu

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.469742
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Chemical vapor deposition (CVD) diamond has outstanding properties, including low thermal expansion, high chemical resistance and high acoustic propagation and has been widely used in optical, electrical, mechanical, chemical and thermal applications. Since synthesized diamond film results in large surface roughness, the surface treatment or polishing should be applied to expand the applications. Although reducing surface roughness by mechanical and etching methods have been investigated, the cost on the complicated equipment and on the long processing time is the most particular important issue. A new method is developed in the present study to approach the smooth surface by a catalytic grinding wheel. As grinding, the catalytic reaction occurs at the contact area between the grinding wheel and the diamond surface, and sp³ structure of diamond can be converted to sp² structure with lower bonding energy; therefore, the lower surface roughness. Consequently, the average surface roughness is extremely improved from 230 nm to 20 nm, and the processing time can be shortened 10 times more than conventional methods, either lapping, or chemical assisted lapping.

Citation Download Citation

Hung-Yin Tsai, Chih-Yung Cheng, Pin-Yin Liu, and Tung-Chuan Wu "Innovative machining method on CVD diamond thin film", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.469742

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available