Optimization and simulation of the surface acoustic wave motor

Xiquan Cui; Lan Wu; Hai-jun Zhang

doi:10.1117/12.483178

10 September 2002 Optimization and simulation of the surface acoustic wave motor

Xiquan Cui, Lan Wu, Hai-jun Zhang

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483178
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Using the numerical analysis method, the mechanism of the surface acoustic wave (SAW) motor is further discussed, the performances of the SAW motor under different slider and stator contact conditions are examined, and many factors that affect the efficiency of the SAW motor are introduced. In addition, the design of SAW motor with power circulation structure is illustrated. Experiments show that the efficiency of the SAW motor increases, and the threshold driving voltage of the SAW motor reduces.

Citation Download Citation

Xiquan Cui, Lan Wu, and Hai-jun Zhang "Optimization and simulation of the surface acoustic wave motor", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available