Nano-stepper-driven optical shutter for applications in free-space micro-optics

Justyna Zawadzka; Lijie Li; Anartz Unamuno; Deepak G. Uttamchandani

doi:10.1117/12.483194

10 September 2002 Nano-stepper-driven optical shutter for applications in free-space micro-optics

Justyna Zawadzka, Lijie Li, Anartz Unamuno, Deepak G. Uttamchandani

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483194
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper we report a simple design of a micro-optical shutter/attenuator. The standard MUMPS process was used to fabricate the device. A vertically erected, gold-coated, 200x300 ?m side length micro-mirror was precisely placed between the end faces of two closely spaced optical fibers. The position of the micro-mirror with respect to the optical fiber end face was controlled by a nano-stepping motor array. Optical and mechanical tests were performed on the device. A 1.55 ?m laser beam was sent along the optical fiber. When the micro-mirror was removed from the front of the fiber, the coupling efficiency between two fibers was –10 dBm. Once the micro-mirror was placed in the optical path the coupling efficiency dropped to –51.5 dBm. The best attenuation was obtained when the micro-mirror blocked the whole cross-section of the laser beam diameter. It is evident that the device can operate as a high precision fiber optic attenuator or shutter.

Citation Download Citation

Justyna Zawadzka, Lijie Li, Anartz Unamuno, and Deepak G. Uttamchandani "Nano-stepper-driven optical shutter for applications in free-space micro-optics", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483194

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