Simulation of optical lithography process for fabricating diffractive optics

Xiao Xiao; Jing Yang; Jinglei Du; Yongkang Guo; Chunlei Du

doi:10.1117/12.481514

30 August 2002 Simulation of optical lithography process for fabricating diffractive optics

Xiao Xiao, Jing Yang, Jinglei Du, Yongkang Guo, Chunlei Du

Proceedings Volume 4924, Holography, Diffractive Optics, and Applications; (2002) https://doi.org/10.1117/12.481514
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Diffractive optics is a rapidly developing branch of optics involved computer generated holography, kinoform technology, microelectronics and microfabrication technology. Fabricating some diffractive optics through optical lithography is an effective method. For optimizing lithography process of manufacturing diffractive optics, surface profiles of deep relief gratings are simulated in this paper. Different photoresists are used in the simulations, and simulation results are discussed.

Citation Download Citation

Xiao Xiao, Jing Yang, Jinglei Du, Yongkang Guo, and Chunlei Du "Simulation of optical lithography process for fabricating diffractive optics", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); https://doi.org/10.1117/12.481514

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