Three-dimensional MEMS optical switch for fiber optic communication applications

Khanh C. Nguyen

doi:10.1117/12.482299

3 September 2002 Three-dimensional MEMS optical switch for fiber optic communication applications

Khanh C. Nguyen

Proceedings Volume 4907, Optical Switching and Optical Interconnection II; (2002) https://doi.org/10.1117/12.482299
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

Micro-electromechanical Systems (MEMS) have been around since the 1960s. Early applications of MEMS were biomedical and automotive such as drug delivery system, disposable blood pressure sensors, accelerometer used in airbag sensor and antilock braking systems. Recently, this technology, known as micro-optical MEMS or MOEMS, is invading the fiber optic communication industry for its ability of moving and managing light directly without converting the optical data to electrical signal for processing, hence it is immune to bit rate and data protocol. This paper will discuss the 3D MEMS optical switch development program at Agere Systems from the design concept to volume production and the dedicated reliability program to qualify this technology for telecom applications.

Citation Download Citation

Khanh C. Nguyen "Three-dimensional MEMS optical switch for fiber optic communication applications", Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); https://doi.org/10.1117/12.482299

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