Micromechanical mirror based on PZN-PT single crystal films

Kee S. Moon; Miguel Levy; Yong K. Hong; Shankar Ghimire

doi:10.1117/12.467609

18 October 2002 A micromechanical mirror based on PZN-PT single crystal films

Kee S. Moon, Miguel Levy, Yong K. Hong, Shankar Ghimire

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467609
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

This paper presents an investigation of a stand-alone PZN-PT film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electro-mechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecommunication applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn₁/3Nb_2/3)O₃-PbTiO₃ (PZN-PT) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 × 400 × 10 μm³ including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.

Citation Download Citation

Kee S. Moon, Miguel Levy, Yong K. Hong, and Shankar Ghimire "A micromechanical mirror based on PZN-PT single crystal films", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467609

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