Nonlinear-optical monitoring system of materials local crystalline characteristics

P. E. Berezhnaja; Mikhail F. Stupak

doi:10.1117/12.484486

29 July 2002 Nonlinear-optical monitoring system of materials local crystalline characteristics

P. E. Berezhnaja, Mikhail F. Stupak

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484486
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The second harmonic generation effect (SHG) has been used for an express, local, non-destructive control of the quantitative and qualitative crystalline characteristics of materials. The characteristics and possibilities of an automated laser monitoring system of crystalline parameters of semiconductor materials are presented. The system allows to determine orientation of crystallographic axes within several minutes. The error of measurements is about 0.1° in local surface area (with a diameter ? 100 microns, depth 0,1 ÷ 1,0 microns). It is possible to detect the presence of local strains (stresses), to create cards of crystal quality of a sample surface and optical quality of the volume of tested materials (obtaining time is about 15 mm.) with the help of this system.

Citation Download Citation

P. E. Berezhnaja and Mikhail F. Stupak "Nonlinear-optical monitoring system of materials local crystalline characteristics", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484486

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