Laser-based technology of scanning near-field optical probe fabrication: study of kinetics and progress of measuring

Vadim P. Veiko; Alexey I. Kalachev; Lev N. Kaporsky; Sergey A. Volkov; Nikolay B. Voznesensky

doi:10.1117/12.486565

19 February 2003 Laser-based technology of scanning near-field optical probes fabrication: study of kinetics and progress of measuring

Vadim P. Veiko, Alexey I. Kalachev, Lev N. Kaporsky, Sergey A. Volkov, Nikolay B. Voznesensky

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486565
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Basic principles of laser assisted process of fiber etching for scanning near-field optical (SNO) probes formation and control technique are presented. The thermal and temporal regimes are considered in order to provide stable reproducibility and high quality of a tapered end of the optical fiber. Problems of adequate definition of the scanning imaging properties of a SNO probe are discussed. Thus an optical method of far-field registration and processing together with a new autoelectronic emission method are considered for solution of the task of a subwavelength SNO probe aperture measurement and estimation of its apparatus function.

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Vadim P. Veiko, Alexey I. Kalachev, Lev N. Kaporsky, Sergey A. Volkov, and Nikolay B. Voznesensky "Laser-based technology of scanning near-field optical probes fabrication: study of kinetics and progress of measuring", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486565

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