Confocal imaging algorithm for profiling rough surfaces with non-gaussian spectra

J. Felix Aguilar

doi:10.1117/12.527052

19 November 2003 Confocal imaging algorithm for profiling rough surfaces with non-gaussian spectra

J. Felix Aguilar

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527052
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

The confocal imaging algorithm is applied to retrieve the profile of 1-D rough surfaces with non-gaussian spectra. Different forms of the autocovariance function are tried in the simulation, gaussian included for reference. The capability and the limitations of the algorithm for each function are to be set in terms of the parameters of roughness such as the rms and the correlation length.

Citation Download Citation

J. Felix Aguilar "Confocal imaging algorithm for profiling rough surfaces with non-gaussian spectra", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.527052

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