Electrostatically deformable microfrequency selective surface

Robert J. MacDonald; Karl Borhinger; Joel Rieter; Paul L. Gassman; Bill Dietze; John Sahr

doi:10.1117/12.453774

4 November 2002 Electrostatically deformable microfrequency selective surface

Robert J. MacDonald, Karl Borhinger, Joel Rieter, Paul L. Gassman, Bill Dietze, John Sahr

Proceedings Volume 4809, Nanoscale Optics and Applications; (2002) https://doi.org/10.1117/12.453774
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

This document describes the combination of frequency selective surfaces (FSS) with deformable MEMS membranes to form a one-by-two optical switch.

Citation Download Citation

Robert J. MacDonald, Karl Borhinger, Joel Rieter, Paul L. Gassman, Bill Dietze, and John Sahr "Electrostatically deformable microfrequency selective surface", Proc. SPIE 4809, Nanoscale Optics and Applications, (4 November 2002); https://doi.org/10.1117/12.453774

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