Paper
29 May 2002 Intracavity fabrication of nanostructures on bulk materials
Vladimir P. Osipov, Vasily V. Valyavko
Author Affiliations +
Proceedings Volume 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures; (2002) https://doi.org/10.1117/12.468990
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus
Abstract
The analytical and experimental investigations describing the intracavity processing of different solid-sate materials (Al, Cr, Ge, Si) are presented. New designs of the laser cavity were explored to facilitate the fabrication of structures composed of a system of equidistant parallel 250 nm-sized grooves and periodic micro-dots on massive samples of metals and semiconductors, as well as micro-holes in thin film metallic samples.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir P. Osipov and Vasily V. Valyavko "Intracavity fabrication of nanostructures on bulk materials", Proc. SPIE 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures, (29 May 2002); https://doi.org/10.1117/12.468990
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CITATIONS
Cited by 3 patents.
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KEYWORDS
Mirrors

Laser processing

Laser resonators

Germanium

Semiconductors

Reflectivity

Silicon

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