Room temperature YBaCuO infrared detectors on a flexible substrate

Zeynep Celik-Butler; Donald P. Butler; Ali Yildiz

doi:10.1117/12.478856

5 August 2002 Room temperature YBaCuO infrared detectors on a flexible substrate

Zeynep Celik-Butler, Donald P. Butler, Ali Yildiz

Proceedings Volume 4721, Infrared Detectors and Focal Plane Arrays VII; (2002) https://doi.org/10.1117/12.478856
Event: AeroSense 2002, 2002, Orlando, FL, United States

Abstract

Infrared microbolometer thermal detectors have been fabricated on a flexible substrate, a polyimide that shows very similar characteristics to Kapton , when cured. The polyimide is spin-coated on a regular Si wafer with a release layer. Low temperature fabrication techniques are employed to minimize the thermal cycling of the polyimide substrate as well as to maintain compatibility with CMOS circuitry. Infrared microsensors on flexible substrates showed a Temperature Coefficient of Resistance (TCR=(1/R)(dR/dT)) of -3.03%, at room temperature. The microbolometers reached the responsivity and detectivity of 3.5x10³ V/W and 1x10⁷ cm.Hz^1/2 /W, respectively, at 2.88 μA of current bias even though at this time no micromachining has been performed. Some devices were encapsulated between polyimide layers in order to provide protection and passivation. These bolometers demonstrated a responsivity and detectivity of 1.6x10³ V/W and 4.9x10⁶ cm.Hz^1/2/W, respectively at 1 μA of current bias. This is the first attempt towards a smart skin that incorporates flexible microsensors on a cured polyimide-substrate.

Citation Download Citation

Zeynep Celik-Butler, Donald P. Butler, and Ali Yildiz "Room temperature YBaCuO infrared detectors on a flexible substrate", Proc. SPIE 4721, Infrared Detectors and Focal Plane Arrays VII, (5 August 2002); https://doi.org/10.1117/12.478856

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