Improved HgCdTe technology for high-performance infrared detectors

Johann Ziegler; Martin Bruder; Wolfgang A. Cabanski; Heinrich Figgemeier; Marcus Finck; Peter Menger; Thomas Simon; Richard Wollrab

doi:10.1117/12.478853

5 August 2002 Improved HgCdTe technology for high-performance infrared detectors

Johann Ziegler, Martin Bruder, Wolfgang A. Cabanski, Heinrich Figgemeier, Marcus Finck, Peter Menger, Thomas Simon, Richard Wollrab

Author Affiliations +

Proceedings Volume 4721, Infrared Detectors and Focal Plane Arrays VII; (2002) https://doi.org/10.1117/12.478853
Event: AeroSense 2002, 2002, Orlando, FL, United States

Abstract

To meet the demands for high performance HgCdTe detectors at high yield and producibility, key processes have been optimized and new approaches have been developed. By a superior CdZnTe Bridgman growth process, dislocation densities <1x10⁵cm^-2 in substrate and epitaxial layer are achieved for all substrates, ensuring high performance Focal-Plane-Arrays, particularly for (lambda) _CO=11,5 micrometers arrays. A new guard ring approach for planar diodes, created by a n⁺-region in pixel spacing area reduces pixel crosstalk and improves Modulation Transfer Function. For high thermal cycles of the FPA, the flip-chip- technique has been optimized, leading to >2000 cycles for 640x512-FPA's. Producibility and reliability of AIM's MCT FPA technology are demonstrated.

Citation Download Citation

Johann Ziegler, Martin Bruder, Wolfgang A. Cabanski, Heinrich Figgemeier, Marcus Finck, Peter Menger, Thomas Simon, and Richard Wollrab "Improved HgCdTe technology for high-performance infrared detectors", Proc. SPIE 4721, Infrared Detectors and Focal Plane Arrays VII, (5 August 2002); https://doi.org/10.1117/12.478853

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