Isolating causes of yield excursions with decision tress and commonality

Peter Waksman

doi:10.1117/12.475647

12 July 2002 Isolating causes of yield excursions with decision tress and commonality

Peter Waksman

Proceedings Volume 4692, Design, Process Integration, and Characterization for Microelectronics; (2002) https://doi.org/10.1117/12.475647
Event: Design, Process Integration, and Characterization for Microelectronics, 2002, Santa Clara, CA, United States

Abstract

The use of Decision Trees to analyze data is discussed as an approach to solving problems of Yield excursions in semiconductor manufacturing. The relation to equipment commonality is discussed along with some of the pitfalls of incautious use of general probability estimates. The paper introduces a Mixing Diagram to help visualize commonality issues, it introduces work around methods for resolving ambiguities in the commonality, it reviews Decision Trees algorithms, and it ends with a discussion of current limitations of the method along with recommendations for future research.

Citation Download Citation

Peter Waksman "Isolating causes of yield excursions with decision tress and commonality", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475647

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