Inspection of chromeless AAPSM

Darren Taylor; Matthew Lassiter; Benjamin George Eynon Jr.; Douglas J. Van Den Broeke; J. Fung Chen

doi:10.1117/12.474513

30 July 2002 Inspection of chromeless AAPSM

Darren Taylor, Matthew Lassiter, Benjamin George Eynon Jr., Douglas J. Van Den Broeke, J. Fung Chen

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474513
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The Chromeless Phase Shift Mask (CLM) approach from ASML MaskTools has been developed as an approach to achieve sub-100nm lithography using currently available stepper technology. The technology uses sub-resolution gray-scaled regions of zero-phase and pi-phase quartz on the mask to produce effective feature widths well below 100nm at the wafer. The features on the mask consist entirely of etched and unetched quartz. No features consist of chrome on the mask. The integration of this type of phase shift mask technology into the photomask-manufacturing environment requires that the mask manufacturer be able to inspect the mask for defects in the quartz. The Defect Sensitivity Monitor (DSM) pattern was used to construct a CLM mask. The mask was inspected using commercially available inspection platforms, and the resulting inspection capability is reported.

Citation Download Citation

Darren Taylor, Matthew Lassiter, Benjamin George Eynon Jr., Douglas J. Van Den Broeke, and J. Fung Chen "Inspection of chromeless AAPSM", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474513

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available