Innovative optical alignment technique for CMP wafers

Ayako Sugaya; Yuho Kanaya; Shinichi Nakajima; Tadashi Nagayama; Naomasa Shiraishi

doi:10.1117/12.474475

30 July 2002 Innovative optical alignment technique for CMP wafers

Ayako Sugaya, Yuho Kanaya, Shinichi Nakajima, Tadashi Nagayama, Naomasa Shiraishi

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474475
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Detecting position of the wafers such as after CMP process is critical theme of current and forthcoming IC manufacturing. The alignment system must be with high accuracy for any process. To satisfy such requirements, we have studied and analyzed factors that have made alignment difficult. From the result of the studies, we have developed new optical alignment techniques which improve the accuracy of FIA (alignment sensor of Nikon's NSR series) and examined them. The approaches are optimizing the focus position, developing an advanced algorithm for position detection, and selecting a suitable mark design. For experiment, we have developed the special wafers that make it possible to evaluate the influence of CMP processes. The experimental results show that the overlay errors decrease dramatically with the new alignment techniques. FIA with these new techniques will be much accurate and suitable alignment sensor for CMP and other processes of future generation ULSI production.

Citation Download Citation

Ayako Sugaya, Yuho Kanaya, Shinichi Nakajima, Tadashi Nagayama, and Naomasa Shiraishi "Innovative optical alignment technique for CMP wafers", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474475

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available