Spin coating and photolithography using liquid and supercritical carbon dioxide

Erik N. Hoggan; Devin Flowers; Joseph M. DeSimone; Ruben G. Carbonell

doi:10.1117/12.474199

24 July 2002 Spin coating and photolithography using liquid and supercritical carbon dioxide

Erik N. Hoggan, Devin Flowers, Joseph M. DeSimone, Ruben G. Carbonell

Proceedings Volume 4690, Advances in Resist Technology and Processing XIX; (2002) https://doi.org/10.1117/12.474199
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

We discuss a new dry lithographic process using only carbon dioxide (CO2) as a solvent. Novel CO2 soluble photoresists were synthesized based on random copolymers of poly(1,1-dihydroperfluorooctyl)methacrylate 2-tetrahyrdopyranyl methacrylate. Photoresist spin casting, development, and stripping were all carried out in either liquid or supercritical CO₂. We investigate such parameters as resist sensitivity, contrast, and resolution. The contrast of these resists has been evaluated using 248 nm exposures, and promising test images have been formed.

Citation Download Citation

Erik N. Hoggan, Devin Flowers, Joseph M. DeSimone, and Ruben G. Carbonell "Spin coating and photolithography using liquid and supercritical carbon dioxide", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474199

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available