Evaluation of resist-film property for CD control

Hiroshi Shinya; Takahiro Kitano; Hidefumi Matsui; Junichi Kitano

doi:10.1117/12.474269

24 July 2002 Evaluation of resist-film property for CD control

Hiroshi Shinya, Takahiro Kitano, Hidefumi Matsui, Junichi Kitano

Proceedings Volume 4690, Advances in Resist Technology and Processing XIX; (2002) https://doi.org/10.1117/12.474269
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

In a photolithography process, it is vital to control Critical Dimension (CD) within wafer. In the current process, although parameters are controlled during post-exposure bake (PEB) and development, only film thickness is checked before exposure for the CD control. However, as the fine patterning by using chemically amplified resist (CAR) has progressed, CD control within wafer has been affected by very small changes of protecting groups; distribution of additives (PAG, quencher etc.) concentrations, and solvent concentrations, thus it has become more important to control film compositions = film properties before exposure. Following by CD variations within wafer caused by air flow in Post applied Bake (PAB) chamber, we examined evaluation methods of KrF resist film properties and made various evaluations of unexposed film after PAB. This paper describes correlation between CD and PAG, quencher, and solvent concentration; consideration of CD variations mechanism based on the correlation data; and problems when shifting to the next generation process.

Citation Download Citation

Hiroshi Shinya, Takahiro Kitano, Hidefumi Matsui, and Junichi Kitano "Evaluation of resist-film property for CD control", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474269

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available