Optical properties of porous fluoride coating for UV and DUV lasers

K. Yoshida; M. Ohya; K. Hatooka; Kanyoshi Ochi; M. Sunagawa; Tomosumi Kamimura

doi:10.1117/12.461692

9 April 2002 Optical properties of porous fluoride coating for UV and DUV lasers

K. Yoshida, M. Ohya, K. Hatooka, Kanyoshi Ochi, M. Sunagawa, Tomosumi Kamimura

Proceedings Volume 4679, Laser-Induced Damage in Optical Materials: 2001; (2002) https://doi.org/10.1117/12.461692
Event: Boulder Damage, 2001, Boulder, CO, United States

Abstract

Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problems. Gradient refractive index antireflection films are produced by the combination of evaporation and leaching process on fused silica substrate. It has a high laser-induced damage threshold of 7.4-8.7 J/cm² at 266 nm. The reflectance is about 0.35%.

Citation Download Citation

K. Yoshida, M. Ohya, K. Hatooka, Kanyoshi Ochi, M. Sunagawa, and Tomosumi Kamimura "Optical properties of porous fluoride coating for UV and DUV lasers", Proc. SPIE 4679, Laser-Induced Damage in Optical Materials: 2001, (9 April 2002); https://doi.org/10.1117/12.461692

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