The critical role of metrology in nanotechnology

Mark L. Schattenburg; Henry I. Smith

doi:10.1117/12.437273

24 July 2002 The critical role of metrology in nanotechnology

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437273
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

The nascent nanotechnology revolution promises many benefits to humankind. An exciting and sometimes bewildering variety of new nanofabrication technologies and nanodevices based on electrical, optical, magnetic, mechanical, chemical and biological effects are reported almost daily. It is prudent to ask, however, how many of these breakthroughs will remain laboratory curiosities and how many will proceed to widespread industrialization. We argue that a metrology infrastructure has underpinned all industrial revolutions, and that this infrastructure is weak or nonexistent for many of the proposed nanosystems. More attention needs to be paid to metrology or progress will be derailed in a number of areas.

Citation Download Citation

Mark L. Schattenburg and Henry I. Smith "The critical role of metrology in nanotechnology", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437273

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available