Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor

Ming Qin; Qing-An Huang; Zhao-Yong Zhang; Xianwei Yan

doi:10.1117/12.444729

15 October 2001 Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor

Ming Qin, Qing-An Huang, Zhao-Yong Zhang, Xianwei Yan

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444729
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

A new micromachined thermal anemometer based on laterally polysilicon diode (LPD) temperature-sensing elements is developed in the paper. The LPD was fabricated with CMOS compatible process and its temperature-sensing characterization is also investigated. The measured results show the forward current increases with temperature near linearly. The temperature coefficient is about 1.8mV/K, which is close to that of monocrystalline silicon diode. A anemometer with a ring-like polysilicon heater and 8 LPD temperature-sensing elements were fabricated and characterized, air flow up to 120 cm³/s was measured and more than 8 directions of wind can be detected.

Citation Download Citation

Ming Qin, Qing-An Huang, Zhao-Yong Zhang, and Xianwei Yan "Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444729

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