Measurement of heat capacity of SnO2 thin films using micro-hotplate

Jun Yu; Zhenan Tang; Guangfen Wei; Philip C.H. Chan

doi:10.1117/12.444709

15 October 2001 Measurement of heat capacity of SnO₂ thin films using microhotplate

Jun Yu, Zhenan Tang, Guangfen Wei, Philip C.H. Chan

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444709
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Thermophysical properties of thin films in microscale are much more different from that of bulk materials. It is very important to characterize their properties for the design and analysis of MEMS devices and ICs. In this paper we demonstrate a technique to test heat capacity of SnO2 thin film. For this purpose, micro-hotplate (MHP) is used as a thin-film differential scanning calorimeter (TDSC). Micro-hotplate is a suspended structure that uses SiO2/Si3N4 membrane as mechanical support and polysilicon resistors as heater and temperature sensor. Providing a pulsed power to the heater, MHP will be heated up with heating rate of about 200000 degree(s)C/s, and with TDSC technique, heat capacity of SnO₂ thin film with thickness of 300nm is measured at temperature ranging from room temperature to 400K.

Citation Download Citation

Jun Yu, Zhenan Tang, Guangfen Wei, and Philip C.H. Chan "Measurement of heat capacity of SnO₂ thin films using microhotplate", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444709

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