Design of a fully compliant bistable micromechanism for switching devices

Hsin-An Chang; Jinni Tsay; Cheng-Kuo Sung

doi:10.1117/12.448840

19 November 2001 Design of a fully compliant bistable micromechanism for switching devices

Hsin-An Chang, Jinni Tsay, Cheng-Kuo Sung

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448840
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

This paper proposes a design of a bistable micromechanism for the application of switching devices. The topology of a fully compliant four-bar mechanism is adopted herein. The central mass of the mechanism is employed as a carriage to carry switching components, such as mirror, electrical contact, etc. The equations that predict the existence of bistable states, the extreme positions of the motion range and the maximum stress states of members were derived. MUMPs provided by Cronos Integrated Microsystems fabricated the proposed micromechanisms for the purpose of verifying the theoretical predictions. Finally, an experimental rig was established. The bistable mechanisms were switched either by the probe or actuators to push the central mass. The experimental results demonstrated that the motions observed approximately met the predicted values.

Citation Download Citation

Hsin-An Chang, Jinni Tsay, and Cheng-Kuo Sung "Design of a fully compliant bistable micromechanism for switching devices", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448840

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